Rectangular Gate Valves
Semi / FPD / OLED / SOLAR
The Others
Door Valves
Semi / FPD / OLED / SOLAR
The Others
Circular Gate Valves
Semi / FPD / OLED / SOLAR
The Others
Angle Valves
Semi / FPD / OLED / SOLAR
The Others
Special Valves
Semi / FPD / OLED / SOLAR
The Others
 
 
> 제품소개 > Special Valves > Semi / FPD / OLED / SOLAR
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Butterfly Gate Vavle  
Butterfly Gate Vavle
- / V83
- Sputter Deposition
- Plasma Etch
- CVD
- Other application that require pressure controller
Rectangular Gate Valve  
Rectangular Gate Valve
Heatd Type / V72
- Where heating is required, heated housing and blade heating is optional
- Plasma Etch, CVD, Sputter Deposition
- Manufacturing of solar panels
- Semiconductor processing
- All other cluster vacuum systems
Protection Gate Valve  
Protection Gate Valve
UCS04 UPS Controller / V60
- Etch, CVD (MO, PE, HDP, LP) Implant, Sputter
- Nanotechnology process with high particulate levels
- Thin film photovoltaic panels
Pendulum Gate Valve  
Pendulum Gate Valve
Large Type / V53
- Sputter Deposition
- Plasma Etch
- CVD
- Other application that require pressure controller
Heated Angle Valve  
Heated Angle Valve
With Temp Contoller / V42
- Etch
- CVD (Mo, LP, HDP, PE)
- Sputter
- R.T.P
- LCD, PDP Systems
- Other Vacuum System
Remote Plasma Control Valve  
Remote Plasma Control Valve
- / V41
- High vacuum process
- All CVD process (including MO, PE, HDP, LP and AP)
- Photovoltaic and semiconductor application
   
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