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> Product > Rectangular Gate Valves > Semi / FPD / OLED / SOLAR
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SOLAR , LCD , FPD / Series V75
Application
- Sputter Deposition
- Plasma Etch
- CVD
- Other application that require pressure controller
Features
- Patented L-motion link and dual shifts without springs in the actuator enable faster, smoother actuation with signifi- cantly reduced vibration
- Mechanical locking so at the end of    gate travel the valve locks into position
- Welded bellows actuator seal
- Double pneumatic actuator
- Bonnet flange bolts are designed with retainers to eliminate bolts from falling out upon disassembly
Options
- Custom sizes available
- Various o-ring compounds (Kalrez®, Chemraz®, etc.)
 
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Pressure range
1 x 10-7 mbar to 1.2 bar
Leak rate : body, seat
< 1 x 10-7 mbar.ℓ/s
Differential pressure on the gate
 ≤ 1.2 bar in either direction
Material
Valve Body, Gate
AL6061
Welded bellows
AM350
Valve actuator
SS304, AL6061
Seal Materials
FKM(VITON)
Temperature
Valve body
80℃
Valve actuator
60℃
Operation
Double acting
Cycle until first service
1 million
Position sensor
SMC (D-A93)
 
 
   
   
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