Rectangular Gate Valves
- Semi / FPD / OLED / SOLAR
- The Others
Door Valves
- Semi / FPD / OLED / SOLAR
- The Others
Circular Gate Valves
- Semi / FPD / OLED / SOLAR
- The Others
Angle Valves
- Semi / FPD / OLED / SOLAR
- The Others
Special Valves
- Semi / FPD / OLED / SOLAR
- The Others
 
 
> Product > Special Valves > Semi / FPD / OLED / SOLAR
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Butterfly Gate Vavle
- / V83
- Sputter Deposition
- Plasma Etch
- CVD
- Other application that require pressure controller
 
Rectangular Gate Valve
Heatd Type / V72
- Where heating is required, heated housing and blade heating is optional
- Plasma Etch, CVD, Sputter Deposition
- Manufacturing of solar panels
- Semiconductor processing
- All other cluster vacuum systems
 
Protection Gate Valve
UCS04 UPS Controller / V60
- Etch, CVD (MO, PE, HDP, LP) Implant, Sputter
- Nanotechnology process with high particulate levels
- Thin film photovoltaic panels
 
Pendulum Gate Valve
Large Type / V53
- Sputter Deposition
- Plasma Etch
- CVD
- Other application that require pressure controller
 
Heated Angle Valve
With Temp Contoller / V42
- Etch
- CVD (Mo, LP, HDP, PE)
- Sputter
- R.T.P
- LCD, PDP Systems
- Other Vacuum System
 
Remote Plasma Control Valve
- / V41
- High vacuum process
- All CVD process (including MO, PE, HDP, LP and AP)
- Photovoltaic and semiconductor application
   
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