Fitting Standard | ISO-K | |
Gate Size (mm) | DN 63mm | |
Pressure Range | 1.3 x E-5 ~ 2.0 x E5 (abs) | |
Helium Leak Rate | External | < 1.0 x E-9 Pa*㎥/sec |
Internal | < 1.0 x E-9 Pa*㎥/sec | |
Feed Through | Fast : Bellows Slow : O-Ring |
|
Pneumatic Actuator Type | Fast : Single acting Slow : Single acting |
|
Air Connection | Fast : OD Ø6 One-Touch Slow : OD Ø6 One-Touch |
|
Air Pressure | 0.5 MPa (Tolerance level : 0.45 ~ 0.6 MPa) |
|
Air Less Lock | Open | N/A |
Close | N/A | |
Life Cycles | Mechanism | 100,000 |
O-Ring(Seal) | 100,000 | |
Lubrication | 100,000 | |
Temperature | Valve Body | ≤ 120°C |
Actuator | ≤ 60°C | |
Lubrication | Vacuum Inside | PFPE Grease (O-Ring Feed through) |
Mechanism | PFPE Grease | |
Materials | Valve Body | STS304 |
Gate(Seat) | STS316L | |
Bellows | STS316L | |
Actuator | AL6061,etc | |
Vacuum Seal | FKM | |
Gate Seal | FKM | |
Pneumatic Seal | FKM | |
Surface Treatment | Valve Body | Bead blasting |
Gate(Seat) | Bare | |
Actuator | Anodizing |