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  • Semi   >   Rectangular Gate Valve   >   Door Valve
  • V77-D_Air Seal Type
* Please use the inquiry phone or bulletin board for various product inquiries.

Fitting Standard  SEMI E21.1-1296
Gate Size (mm) 50mm x 336mm
Pressure Range 1.0xE-7 Pa ~ 1.0xE5 Pa
Helium Leak Rate External N/A
Internal < 1.0xE-10 Pa*㎥/sec
Feed Through Welded Bellows
Pneumatic Actuator Type Double acting
Air Connection OD Ø6 Speed Coutroller with Indicator (Meter-Out)
Air Pressure 0.55 MPa (Tolerance level : 0.5~0.6 MPa)
Air Less Lock Open N/A
Close Lock
Life Cycles Mechanism 3,000,000
Bellows N/A
O-Ring (Seal) 1,000,000
Lubrication 1,000,000
Temperature Gate (Seat)  MAX. 120℃ 
Actuator MAX. 60℃ 
Lubrication Vacuum Inside Non Lubrication 
Mechanism PFPE Grease
Materials Valve Housing AL6061 
Gate(Seat) AL6061
Bonnet  AL6061
Shaft (Stem) STS304
Bellows AM350 
Bellows End Piece  STS304
Gate Seal FKM
Bonnet Seal N/A
Vacuum Seal  N/A
Pneumatic Seal FKM
Surface Treatment Valve Body Vibration Sanding
Gate (Seat) Bare
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