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  • Semi   >   Rectangular Gate Valve   >   Door Valve
  • V77-D_Air Seal Type
* Please use the inquiry phone or bulletin board for various product inquiries.

Fitting Standard SEMI E21.1-1296
Gate Size (mm) 50mm x 716mm
Pressure Range 1.0xE-7 Pa to 1.2xE5 Pa(abs)
Helium Leak Rate External N/A
Internal < 1.0xE-10 Pa*㎥/sec
Feed Through O-Ring Shaft Seal
Pneumatic Actuator Type Double Acting
Air Connection OD Ø 6, Speed Controller with Indicator (Meter-out)
Air Pressure 0.55 MPa (Tolerance level : 0.5~0.6 MPa)
Air Less Lock Open N/A
Close N/A
Life Cycles Mechanism 3,000,000
Bellows 3,000,000
O-Ring (Seal) 1,000,000
Lubrication 1,000,000
Temperature Gate (Seat)  ≤ 120°C
Actuator ≤ 60°C
Lubrication Vacuum Inside Non Lubrication 
Mechanism PFPE Grease
Materials Valve Housing N/A
Gate(Seat) AL6061 
Bonnet  AL6061
Shaft (Stem) STS304
Mechanism(Cylinder) AL6061 
Bellows AM350 
Bellows End Piece  STS304
Vacuum Seal  FKM
Pneumatic Seal FKM
Surface Treatment Valve Body N/A
Gate (Seat) Anodizing
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