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  • Semi   >   Rectangular Gate Valve   >   Slot Valve
  • V74-P_Simple Design(One Cylinder)
* Please use the inquiry phone or bulletin board for various product inquiries.

Fitting Standard SEMI E21.1-1296
Gate Size (mm) 50mm x 336mm
Pressure Range 1.0xE-7 Pa ~ 1.2xE5 Pa 
Helium Leak Rate External < 1.0xE-10 Pa*㎥/sec
Internal < 1.0xE-10 Pa*㎥/sec
Feed Through Welded Bellows
Pneumatic Actuator Type Double acting 
Air Connection Ø6, Speed Controller
Air Pressure 0.5 MPa
(Tolerance level : 0.45 ~ 0.6 MPa)
Air Less Lock Open N/A
Close Lock
Life Cycles Mechanism 3,000,000
Bellows 3,000,000
O-Ring (Seal) 1,000,000
lubrication 1,000,000
Temperature Body ≤ 120 °C
Actuator ≤ 60 °C
Lubrication Vacuum inside Non lubrication
Mechanism PFPE Grease
Materials Valve Body AL6061
Gate(Blade) AL6061
Seal Plate(Bonnet) AL6061
Shaft(stem)  STS304
Welded Bellows AM350
Bellows end Piece STS304
Mechanism(Cylinder AL6061,STB2, POM
Gate seal  FKM
Vacuum seal FKM
Pneumatic seal NBR
Surface Treatment Valve Body Bare
Gate (Blade) Bare
내용3
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