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  • Semi   >   Rectangular Gate Valve   >   Bidirectional Gate Valve
  • V73-P_양방향씰링, LAM설비
* Please use the inquiry phone or bulletin board for various product inquiries.

Fitting Standard SEMI E21.1-1296 
Gate Size (mm) 50mm x 336mm 
Pressure Range 1.0xE-4Pa ~ 1.2xE5 Pa (abs) 
Helium Leak Rate TM Valve External < 1.0xE-8 Pa*㎥/sec
Internal < 1.0xE-8 Pa*㎥/sec
L/L Valve External < 1.0xE-8 Pa*㎥/sec
Internal < 1.0xE-8 Pa*㎥/sec
Feed Through TM Valve, L/L Valve Welded Bellows Seal 
Pneumatic Actuator Type Double Acting
Air Connection OD Ø6 / one-touch type / Speed Controller (Meter-out) 
Air Pressure 0.5 MPa (Tolerance level : 0.45 ~ 0.6 MPa) 
Air Less Lock Open N/A
Close Lock
Life Cycles TM VALVE 3,000,000
PM VALVE 3,000,000
Temperature Housing ≤ 120℃ 
Actuator ≤ 60℃ 
Lubrication Vacuum inside Non lubrication 
Mechanism PFPE Grease 
Air Cylinder  PAO Grease 
Materials Valve Housing AL6061 
Housing Seal TM Side  FFKM
L/L Side FFKM
Gate (Seat)  AL6061
Bonnet AL6061
Shaft(stem)  STS304
Bellows AM350 
Bellows End Piece  STS316L 
Gate Seal  TM Valve FKM (F-972) 
L/L Valve FFKM (Kalrez 8575) 
Vacuum Seal  FKM(F-972) 
Pneumatic Seal  FKM(F-972) 
Surface Treatment Valve Housing  Anodizing
O-Ring Groove & Seal Surface (Bare)
Gate (Seat)  Anodizing
O-Ring Groove & Seal Surface (Bare) 
내용3
  • Head Office : 1433-64, Seobu-ro, Gwonseon-gu, Suwon-si, Gyeonggi-Do, Korea | TEL : +82-31-8003-1133 | FAX : +82-31-8003-3399 |
  • Contact us at jw.jee@presys.kr | Copyright(c) 2013 Presys. All Rights Reserved.