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Valve Outside
Size Table
Fitting Standard | SEMI E21.1-1296 | |
---|---|---|
Gate Size (mm) | 50mmx 716mm | |
Pressure Range | 1.0xE-7Pa to 1.2xE5 Pa(abs) | |
Helium Leak Rate | External | N/A |
Internal | <1.0xE-10 Pa*㎥/sec | |
Feed Through | O-RingShaft Seal | |
Pneumatic Actuator Type | Double Acting | |
Air Connection | ODØ 6, Speed Controller with Indicator (Meter-out) | |
Air Pressure | 0.55MPa (Tolerance level : 0.5~0.6 MPa) | |
Air Less Lock | Open | N/A |
Close | N/A | |
Life Cycles | Mechanism | 3,000,000 |
Bellows | 3,000,000 | |
O-Ring(Seal) | 1,000,000 | |
Lubrication | 1,000,000 | |
Temperature | Gate(Seat) | ≤120°C |
Actuator | ≤60°C | |
Lubrication | Vacuum Inside | Non Lubrication |
Mechanism | PFPE Grease | |
Materials | Valve Housing | N/A |
Gate(Seat) | AL6061 | |
Bonnet | AL6061 | |
Shaft(Stem) | STS304 | |
Mechanism(Cylinder) | AL6061 | |
Bellows | AM350 | |
Bellows End Piece | STS304 | |
Vacuum Seal | FKM | |
Pneumatic Seal | FKM | |
Surface Treatment | Valve Body | N/A |
Gate(Seat) | Anodizing |
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